Queensgate Instruments has extended its range of high-performance nanopositioning piezo stages with a lever-amplified, heavy-duty stage capable of moving loads of up to 6 kg.
Image Credit: Queensgate Instruments
The stage has a range of 250 µm and is available in two configurations: the QGNPS-X-250B for horizontal travel, and the QGNPS-Z-250B for vertical movement. Both configurations offer the sub-nanometer resolution required for precision manufacturing applications.
The stage achieves its high-precision movements through the combination of flexure-guidance together with capacitive sensors, as Queensgate product manager, Craig Goodman, explains:
“The system features flexure-guided motion that virtually eliminates rotational errors. The capacitive sensors directly measure the platform’s movement, which, combined with the near-infinite resolution of piezo actuators and our low-noise control electronics, helps ensure the highest-precision positioning.”
Users can select calibration parameters to suit their application and payload to achieve rapid step-settle times. 18 ms for a 2 µm step at maximum load capacity.
Designed for demanding, high-precision industrial applications, typical uses include:
- Optical nosepiece positioning
- White light surface metrology
- Semiconductor inspection
- Precision manufacturing